Transfer Chamber Component

Octagonal shape
1-2 load locks + 4-5 process chambers
Dry scroll roughing pump
Turbomolecular or Cryogenic high vacuum pump
Generic design supporting different robots
Full automation
Large top service-door for full access

Other Products We Offer

TFDS-550C – MULTI-CHAMBER VACUUM CLUSTER

Wafer / Substrate Load-Lock Component

Batch / Cassette Load Lock

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vacuumltd

vst

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