The TFDS-870 Thin Film Deposition Systems are designed to be integrated with Inert Gas Glove Box primarily for organic layer deposition R&D scale as well as part of the fabrication line under inert gas environment. VST developed a wide range of combined thin film deposition/glove box systems, for customers who require vacuum deposition while ensuring that samples remain in an inert atmosphere during “pre” or “post”- deposition, handling or between successive depositions.
Major applications for our combined glove box/thin-film deposition system products include research and production in the following areas:
Our systems design is exceptional flexible and in conjunction with the wide range of components available, allows the perfect fit of the system to the researcher needs. Most of the known deposition sources such as low temperature organic material evaporation, thermal evaporation, electron beam, ion beam, sputtering, plasma sources, etc. can be easy integrated.
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