TFDS-550C – MULTI-CHAMBER VACUUM CLUSTER

TFDS-550C is a multi-chamber vacuum cluster tool is capable to integrate up to 7 process modules including but not only:

Load lock/s for loading/unloading
Metal and organic deposition
Thermal treatment chambers
Masks storage chamber

Features:

Processing of substrates up to 200×200 mm, and larger.
Fully automated robotic sample transfer system
Face down design if evaporation is required
Rectangular gate valves to separate modules from robot chamber
Totally dry pumping system
Rotating / positioning substrate holders
Mask Changing/Storage Module for up to 20 masks
Base pressure ≤ 5 · 10-7 mbar
PLC/PC fully automated process control

Deposition Techniques Available:

Thermal Evaporation, includes RADAK sources
Electron Beam Evaporation
Ion Beam Assisted E.B. Evaporation
Flash Evaporation
Magnetron Sputtering (RF, DC, Pulsed DC and HIPIMS)
Organic Evaporation, available with up to 8 Low Temperature Evaporation
Inductive Coupled Plasma
Laser Ablation
Pulsed Laser Deposition
Ion Beam Sputtering
Ion Beam Etching

Process Options:

Heating
Cooling
Ion Source Cleaning
Reactive Plasma Surface Activation
Reactive Gases Partial Pressure
Progressive Mask

Other Products We Offer

Transfer Chamber Component

Wafer / Substrate Load-Lock Component

Batch / Cassette Load Lock

VST Tool Users

angstromengineering

ajaint

pvdproducts

lesker

vaportech

oerlikon

picosun

beneq

forgenano

idealvac

mbraun

vigor-glovebox

lctechinc

tmaxcn

vti-glovebox

lithmachine

vinci-technologies

prevac

evatecnet

buhlergroup

ferrotec

vacuumltd

vst

Join Lubbe On

Copyright © 2023 Lubbe LLC – All Rights Reserved – Privacy Policy