TFDS-462U

A series of large deposition systems with 2 process chambers and a one transfer chamber, also used as a load-lock system. Built on a self-contained frame, with “Through the Wall” design, TFDS-462U series perfectly fits cleanrooms and clean production floor environments. It is fully assembled and shipped in one piece to decrease installation time and provide comprehensive solution in the smallest available footprint essential for clean room and production application.

Module A:

High Vacuum Evaporation System

E-gun process chamber
4 up to 8 material pockets
Ion Gun for pre-cleaning
Assisted evaporation
Stainless steel water-cooled chamber
Built-in vacuum pumping system
High temperature substrate holder

Module B:

High Vacuum Sputtering System

Up to 6 sputtering magnetrons
ICP ion-assist source, can be also used for pre-cleaning
Built-in vacuum pumping system
Two interchangeable substrate holders, cooled and heated

Module C:

Transfer / Load lock System

Handles up to 8 inch diameter substrate
Up to 300 mm wafer – an option
Direct in vacuum loading in any of the chambers
Transfers in vacuum from one to another chamber

ALTERNATIVE CONFIGURATIONS:

Two evaporation chambers
Two sputtering chambers
Organic deposition chamber with up to eight low temperature evaporation / LTE in any combination
Turbomolecular pumps or cryogenics pumps
With and without transfer chamber
Size and quantity of substrates according to client request

EVAPORATION CHAMBER ALTERNATIVE CONFIGURATIONS:

Additional thermal evaporation sources
Glow discharge
Different sizes and number of crucibles
Additional gas inlets
Substrate cooling
Several combinations of substrate holders/ manipulators
Vertical movement of substrate up to 300mm to reduce cost of materials in case of precious elements (Gold, Platinum, etc.) by reducing distance source to substrate.

SPUTTERING CHAMBER ALTERNATIVE CONFIGURATIONS:

3 different standard sizes of magnetron sputtering targets: 2″, 3″ and 4″
Configured DC, DC pulsed and/or RF power supplies
Co-Sputtering facilities
Additional gas inlets

TFDS-462U

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