MLD-340

Molecular Layer Deposition System with Load-Lock viewport

Square tube reactor, 34 H x 102 W mm inside
Two viewports 2.75” for in-situ ellipsometer
6” load lock viewport
Load lock vertical, 14” stroke with 6” door
Valves electro-pneumatic, SST
Heater 3 zones, independent control
PC/PLC control with touch-screen HMI

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