TFDS-840 (With Load Lock)

Compact PVD System with Medium Size Chamber With Load Lock

Thermal, EB-gun, DC & RF sputtering

Manual, Precision Magnetic Manipulator (PMM)
Wafer transfer systems
Robotic load lock with or without cassette

Other Products We Offer

TFDS-842 – COMPACT SPUTTERING SYSTEMS

BELL JAR THIN FILM DEPOSITION SYSTEM TFDS-462T

TFDS-842 (Without Load Lock)

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