Batch / Cassette Load Lock

Customized cassettes for wafers and substrates
Supports 10-25 wafers/masks/substrates
Vertical cassette lift
Side service-door for full access
Dry scroll roughing pump
Low Vibration Turbomolecular pump
Full automation

Other Products We Offer

Transfer Chamber Component

Wafer / Substrate Load-Lock Component

TFDS-550C – MULTI-CHAMBER VACUUM CLUSTER

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