Integrated Gloveboxes Lab

General Purpose or Tailored for Specific Research (Semiconductors, MEMS, Display Panels, etc.) For Clean-Rooms and White-Rooms

  • Concatenated Gloveboxes in L or U shape, facing each other or back-to-back
  • One or more gloveboxes for wet processes
  • Several gloveboxes for PVD/ALD/MLD processes
  • Characterization glovebox/es • Wet and dry purification systems
  • Large and small antechambers between gloveboxes with access door
  • Control panel and HMI for each deposition system
  • Centralized control system for all gloveboxes