Fully Automated, High-Vacuum, Heated Degassing System with option for QCM
• Hot-wall, rugged high-vacuum oven
• Outgassing at high vacuum in the range of 10-7 Torr
• Temperature from 40ºC to 120ºC
• Automatic vacuum – purging- venting cycles
• ISO 14644-1 cleanroom standard class ISO7
compatible
• US FED STD 209E class 10,000 compatible
• Totally dry pumping system
• Integrated Quartz Crystal Microbalance (QCM)
option for contamination control
• Option – suitable air-to-water cooling chille
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