TFDS-870 GLOVE BOX INTEGRATED

The TFDS-870 Thin Film Deposition Systems are designed to be integrated with Inert Gas Glove Box primarily for organic layer deposition R&D scale as well as part of the fabrication line under inert gas environment. VST developed a wide range of combined thin film deposition/glove box systems, for customers who require vacuum deposition while ensuring that samples remain in an inert atmosphere during “pre” or “post”- deposition, handling or between successive depositions.

Major applications for our combined glove box/thin-film deposition system products include research and production in the following areas:

OLED/PLED technology
Display technologies
Photovoltaic cells
Super-capacitors
Printed electronics
Batteries
Biotechnology

Our systems design is exceptional flexible and in conjunction with the wide range of components available, allows the perfect fit of the system to the researcher needs. Most of the known deposition sources such as low temperature organic material evaporation, thermal evaporation, electron beam, ion beam, sputtering, plasma sources, etc. can be easy integrated.

Features:

Glovebox with 3 and more gloves
2 access doors with interlocks, one door from the glovebox-side and one from the atmosphere side used for service
Fast cycling to enable several runs per day with dry and wet high vacuum pumping setups according to process requirements
Protective liners, easy removable for cleaning purpose
Up to 8 Low Temperature Evaporators
Thermal, EB-gun, ion-gun and sputtering deposition are supported
Optional co-deposition from two, three and more sources
Combination of organic and metal sources
Fully automated with PLC/PC control
Human friendly engineering offers safe operation fully protected against operator errors
Several levels of security are used to differentiate operators, process engineers, or service user levels
Remote Internet Support (RIS) for service, software update, training
Data logging of process parameters
The recorded data can be review online or offline
Turbomolecular or cryogenic pump, combined with oil or dry roughing pump
Additional accessories are supported integrally in the same box: vacuum oven, refrigerator, freezer, spin-coater, etc.

TFDS-870 GLOVE BOX INTEGRATED

Other Products We Offer

Integrated Gloveboxes Lab

TCH – 440

TCH-005 Compact Vacuum Oven for Glove Box integration

VST Tool Users

angstromengineering

ajaint

pvdproducts

lesker

vaportech

oerlikon

picosun

beneq

forgenano

idealvac

mbraun

vigor-glovebox

lctechinc

tmaxcn

vti-glovebox

lithmachine

vinci-technologies

prevac

evatecnet

buhlergroup

ferrotec

vacuumltd

vst

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